Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142501 | Substrate processing system and temperature control method | Kenichiro Yamada, Satoru TERUUCHI, Kenichiro Nakamura | 2024-11-12 |
| 11019285 | Calibration method of infrared camera and calibration system of infrared camera | Tomohisa Kitayama, Takashi Kubo | 2021-05-25 |
| 10921773 | Temperature control method | Noriiki Masuda, Kenichiro Nakamura, Hiroshi Koizumi | 2021-02-16 |
| 10139289 | Temperature measurement device, light emitting module and temperature measurement method | Kenichiro Yamada, Shinya Yamanaka | 2018-11-27 |
| 10139290 | Optical temperature sensor and method for manufacturing optical temperature sensor | Kenichiro Yamada, Yoshiki Yamakawa, Yuji MIZUMA, Hirokazu Taniguchi, Masatoshi Tabira | 2018-11-27 |
| 9885612 | Optical temperature sensor and method of controlling same | Kenichiro Yamada | 2018-02-06 |