Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10921773 | Temperature control method | Takari YAMAMOTO, Kenichiro Nakamura, Hiroshi Koizumi | 2021-02-16 |
| 9466506 | Substrate processing system, gas supply unit, method of substrate processing, computer program, and storage medium | — | 2016-10-11 |
| 8679255 | Gas supply device, substrate processing apparatus and substrate processing method | — | 2014-03-25 |
| 8430962 | Gas supply device, substrate processing apparatus and substrate processing method | — | 2013-04-30 |