Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923211 | Correction data creating method, substrate processing method, and substrate processing system | Hiroki Endo | 2024-03-05 |
| 11019285 | Calibration method of infrared camera and calibration system of infrared camera | Takashi Kubo, Takari YAMAMOTO | 2021-05-25 |