Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837480 | Temperature controlling apparatus, temperature controlling method, and placing table | Katsuyuki Koizumi | 2023-12-05 |
| 11735392 | Plasma processing apparatus | Daisuke Hayashi, Katsuyuki Koizumi | 2023-08-22 |
| 11011347 | Plasma processing apparatus | Daisuke Hayashi, Katsuyuki Koizumi | 2021-05-18 |
| 10923369 | Temperature controlling apparatus, temperature controlling method, and placing table | Katsuyuki Koizumi | 2021-02-16 |
| 10361089 | Plasma processing method | Jun Hirose | 2019-07-23 |
| 7870751 | Temperature control system and substrate processing apparatus | Toshihiro Hayami | 2011-01-18 |
| 7510884 | Semiconductor production system and semiconductor production process | Tsuneyuki Okabe | 2009-03-31 |