Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293903 | Substrate support and plasma processing apparatus | Hajime Tamura, Yasuharu Sasaki, Shin Yamaguchi, Katsuyuki Koizumi | 2025-05-06 |
| 12272528 | Stage and plasma processing apparatus | Yasuharu Sasaki, Shin Yamaguchi, Hajime Tamura | 2025-04-08 |
| 11935729 | Substrate support and plasma processing apparatus | Hajime Tamura, Yasuharu Sasaki, Shin Yamaguchi, Katsuyuki Koizumi | 2024-03-19 |
| 11908666 | Stage and plasma processing apparatus | Yasuharu Sasaki, Shin Yamaguchi, Hajime Tamura | 2024-02-20 |
| 11437223 | Stage and plasma processing apparatus | Yasuharu Sasaki, Shin Yamaguchi, Hajime Tamura | 2022-09-06 |