Issued Patents All Time
Showing 51–71 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9214376 | Substrate mounting stage and surface treatment method therefor | Masakazu Higuma, Tadashi Aoto, Eiichiro Kikuchi | 2015-12-15 |
| 9200826 | Cooling system, substrate processing apparatus having cooling system and cooling method | — | 2015-12-01 |
| 9017786 | Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck device | Ken Yoshioka, Syuichi Takahashi | 2015-04-28 |
| 8981263 | Electrostatic chuck apparatus | Kenji Masuzawa, Toshiyuki MAKABE, Mamoru Kosakai, Takashi Satou, Kazunori Ishimura +2 more | 2015-03-17 |
| 8950469 | Temperature control system and temperature control method for substrate mounting table | Ryo Nonaka, Nobuyuki Nagayama | 2015-02-10 |
| 8823404 | Evaluation device and evaluation method for substrate mounting apparatus and evaluation substrate used for the same | — | 2014-09-02 |
| 8696862 | Substrate mounting table, substrate processing apparatus and substrate temperature control method | — | 2014-04-15 |
| 8573836 | Apparatus and method for evaluating a substrate mounting device | Takehiro Ueda, Taketoshi Okajo, Kaoru Oohashi | 2013-11-05 |
| 8512511 | Mounting table and plasma processing apparatus | Shinji Himori | 2013-08-20 |
| 8252132 | Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck device | Ken Yoshioka, Syuichi Takahashi | 2012-08-28 |
| 8043971 | Plasma processing apparatus, ring member and plasma processing method | Tsuyoshi Moriya, Hiroshi Nagaike | 2011-10-25 |
| 7815492 | Surface treatment method | Masakazu Higuma, Tadashi Aoto, Eiichiro Kikuchi | 2010-10-19 |
| 7646581 | Electrostatic chuck | Takehiro Ueda, Yusuke Nakagawa, Nobuyuki Nagayama, Taketoshi Okajo, Mamoru Kosakai | 2010-01-12 |
| 7582491 | Method for diagnosing electrostatic chuck, vacuum processing apparatus, and storage medium | Taketoshi Okajo | 2009-09-01 |
| D587222 | Attracting plate of an electrostatic chuck for semiconductor manufacturing | Mamoru Kosakai | 2009-02-24 |
| D570310 | Attracting plate of an electrostatic chuck for semiconductor manufacturing | — | 2008-06-03 |
| 7337745 | Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor | Mitsuaki Komino, Hideaki Amano, Shosuke Endo, Toshiaki Fujisato | 2008-03-04 |
| 7033444 | Plasma processing apparatus, and electrode structure and table structure of processing apparatus | Mitsuaki Komino, Kyo Tsuboi, Hideaki Amano | 2006-04-25 |
| 6955912 | Process for producing Trichoderma harzianum ferm BP-4346 | Susumu Sasaki | 2005-10-18 |
| D496008 | Exhaust ring for manufacturing semiconductors | Syuichi Takahashi | 2004-09-14 |
| 6753295 | Plant activator, process for producing the same, activation method, activity promoter and method for applying the promoter | — | 2004-06-22 |