Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715630 | Plasma processing apparatus | Yusuke Hayasaka, Shuhei Yamabe, Naoki Tamaru, Keisuke YOSHIMURA | 2023-08-01 |
| 11538668 | Mounting stage, substrate processing device, and edge ring | Yasuharu Sasaki, Tomoya Kato, Shoichiro Matsuyama | 2022-12-27 |
| 7554095 | Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate | Takashi Fuse, Tadashi Kotsugi, Koji Takeya | 2009-06-30 |
| 7550739 | Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate | Takashi Fuse, Tadashi Kotsugi, Koji Takeya | 2009-06-23 |
| 7521687 | Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate | Takashi Fuse, Tadashi Kotsugi, Koji Takeya | 2009-04-21 |
| 7033444 | Plasma processing apparatus, and electrode structure and table structure of processing apparatus | Mitsuaki Komino, Yasuharu Sasaki, Hideaki Amano | 2006-04-25 |
| 5956837 | Method of detaching object to be processed from electrostatic chuck | Iku Shiota | 1999-09-28 |