Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9691643 | Etching apparatus | Eiichi Nishimura, Fumiko Yamashita | 2017-06-27 |
| 9245764 | Semiconductor device manufacturing method | Eiichi Nishimura, Fumiko Yamashita, Kenji Adachi | 2016-01-26 |
| 8993352 | Plasma processing method and plasma processing apparatus | Eiichi Nishimura, Takashi Sone | 2015-03-31 |
| 8877081 | Etching method and etching apparatus | Eiichi Nishimura, Fumiko Yamashita | 2014-11-04 |
| 7554095 | Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate | Takashi Fuse, Kyo Tsuboi, Koji Takeya | 2009-06-30 |
| 7550739 | Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate | Takashi Fuse, Kyo Tsuboi, Koji Takeya | 2009-06-23 |
| 7521687 | Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate | Takashi Fuse, Kyo Tsuboi, Koji Takeya | 2009-04-21 |