Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479410 | Processing method for object to be processed including a pre-coating step to seal fluorine | Shoichi Abe | 2002-11-12 |
| 6472711 | Semiconductor substrate and production method thereof | — | 2002-10-29 |
| 6171932 | Semiconductor substrate and production method thereof | — | 2001-01-09 |
| 5956837 | Method of detaching object to be processed from electrostatic chuck | Kyo Tsuboi | 1999-09-28 |