Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841278 | Temperature measurement sensor, temperature measurement system, and temperature measurement method | Tong Wu, Masaaki Miyagawa | 2023-12-12 |
| 11460355 | Antenna device and temperature detection method | Tong Wu | 2022-10-04 |
| 11114321 | Apparatus and method for real-time sensing of properties in industrial manufacturing equipment | Sylvain Ballandras, Thierry LaRoche, Kimihiro Matsuse, Jacques Berg | 2021-09-07 |
| 10837810 | Method for calibrating measuring device and case used in the calibration method | Kippei Sugita | 2020-11-17 |
| 10837991 | Electrostatic capacitance measuring device | Kippei Sugita, Satoru Nishio | 2020-11-17 |
| 10634479 | Measuring instrument for measuring electrostatic capacity and method of calibrating transfer position data in processing system by using measuring instrument | Kippei Sugita | 2020-04-28 |
| 10074549 | Method for acquiring data indicating electrostatic capacitance | Kippei Sugita | 2018-09-11 |
| 10018484 | Sensor chip for electrostatic capacitance measurement and measuring device having the same | Kippei Sugita | 2018-07-10 |
| 9970838 | Pressure measuring device and pressure measuring method | — | 2018-05-15 |
| 9903739 | Sensor chip for electrostatic capacitance measurement and measuring device having the same | Kippei Sugita | 2018-02-27 |
| 9841395 | System of inspecting focus ring and method of inspecting focus ring | Kippei Sugita | 2017-12-12 |
| 9709453 | Pressure sensor and method for manufacturing the same | — | 2017-07-18 |
| 9702038 | Pressure sensor and method for manufacturing the same | — | 2017-07-11 |
| 8749257 | Position detecting method for performing position alignment of transfer point of transfer arm | Toshiyuki Matsumoto, Yuichi Douki, Koji Mahara | 2014-06-10 |
| 8149005 | Jig for detecting position | Toshiyuki Matsumoto, Yuichi Douki, Koji Mahara | 2012-04-03 |
| 7994793 | Jig for detecting position | Toshiyuki Matsumoto, Koji Mahara, Yuichi Douki | 2011-08-09 |
| 7977609 | Temperature measuring device using oscillating frequency signals | Nobuyuki Sata, Takahiro Kitano, Tetsuo Fukuoka, Toshiyuki Matsumoto | 2011-07-12 |
| 7923665 | Temperature measuring device and method for measuring wafer-type thermometers | Toshiyuki Matsumoto | 2011-04-12 |
| 7510611 | Coating film forming method and apparatus | Shinichi Sugimoto, Takahiro Kitano, Jun Ookura, Hiroaki Kurishima | 2009-03-31 |
| 7488505 | Coating film forming method and system | Shinichi Sugimoto, Takahiro Kitano, Jun Ookura, Hiroaki Kurishima | 2009-02-10 |
| 7024798 | Low-pressure dryer and low-pressure drying method | Hiroshi Shinya, Takahiro Kitano | 2006-04-11 |
| 6986214 | Low-pressure dryer and low-pressure drying method | Hiroshi Shinya, Takahiro Kitano | 2006-01-17 |
| 6884294 | Coating film forming method and apparatus | Shinichi Sugimoto, Takahiro Kitano, Jun Ookura, Hiroaki Kurishima | 2005-04-26 |
| 6796054 | Low-pressure dryer and low-pressure drying method | Hiroshi Shinya, Takahiro Kitano | 2004-09-28 |
| 6776845 | Coating film forming method and system | Shinichi Sugimoto, Takahiro Kitano, Jun Ookura, Hiroaki Kurishima | 2004-08-17 |