Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476136 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Eiichi Sekimoto, Takayuki Fukudome, Kousuke Yoshihara, Suguru Enokida +2 more | 2022-10-18 |
| 11087983 | Thermal treatment apparatus, thermal treatment method, and non-transitory computer storage medium | Eiichi Sekimoto, Hiroshi Seko | 2021-08-10 |
| 10886151 | Heating apparatus and substrate processing apparatus | Kenichi Shigetomi, Takayuki Fukudome | 2021-01-05 |
| 10504757 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Eiichi Sekimoto, Takayuki Fukudome, Kousuke Yoshihara, Suguru Enokida +2 more | 2019-12-10 |