Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476136 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Eiichi Sekimoto, Kousuke Yoshihara, Suguru Enokida +2 more | 2022-10-18 |
| 10886151 | Heating apparatus and substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa | 2021-01-05 |
| 10504757 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Eiichi Sekimoto, Kousuke Yoshihara, Suguru Enokida +2 more | 2019-12-10 |