HS

Hiroshi Seko

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,743,202 of 4,157,543Top 70%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11087983 Thermal treatment apparatus, thermal treatment method, and non-transitory computer storage medium Eiichi Sekimoto, Takeshi Saikusa 2021-08-10