Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469115 | Substrate processing apparatus, substrate processing method and recording medium | Takaya Kikai | 2022-10-11 |
| 11443964 | Substrate processing apparatus and substrate processing system | Masatoshi Kaneda, Keisuke Yoshida | 2022-09-13 |
| 11049739 | Ashing apparatus, ashing method and recording medium | Takaya Kikai | 2021-06-29 |
| 10867813 | Substrate processing apparatus, substrate processing method and recording medium | Takaya Kikai | 2020-12-15 |
| 10867817 | Substrate processing apparatus, substrate processing method, and storage medium | Takaya Kikai, Yuichi Yoshida | 2020-12-15 |
| 10795265 | Substrate processing apparatus, substrate processing method, and storage medium | Norihisa Koga, Yoshitaka Konishi, Naruaki Iida, Kazuhiro Takeshita | 2020-10-06 |
| 10615062 | Substrate processing apparatus, substrate processing method, and storage medium | Takaya Kikai, Yuichi Yoshida | 2020-04-07 |
| 10591823 | Substrate processing apparatus and substrate processing method | Keisuke Yoshida, Keisuke Sasaki, Shoichi Terada | 2020-03-17 |
| 9514951 | Substrate processing method, substrate processing apparatus, substrate processing system and recording medium | Masatoshi Kaneda, Keisuke Yoshida | 2016-12-06 |