Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441101 | Cleaning composition, cleaning method, and method for manufacturing semiconductor | Isao Hirano, Kazumasa Wakiya, Junji Nakamura, Takayuki Toshima | 2022-09-13 |
| 11355362 | Washing method, washing device, storage medium, and washing composition | Isao Hirano, Junji Nakamura, Takayuki Toshima | 2022-06-07 |
| 10591823 | Substrate processing apparatus and substrate processing method | Keisuke Yoshida, Yuzo Ohishi, Keisuke Sasaki | 2020-03-17 |
| 10347482 | Substrate processing apparatus, substrate processing method, and storage medium with program stored therein for executing substrate processing method | Takayuki Toshima, Junji Nakamura | 2019-07-09 |
| 10237959 | Discharge lamp lighting device | Kosuke Saka, Minoru Fukuda, Shigeyoshi Matsumoto | 2019-03-19 |
| 9744551 | Coating apparatus and nozzle | Takayuki Ishii, Takahiro Sakamoto, Takahiro Kitano | 2017-08-29 |
| 8888920 | Imprint system, imprint method, and non-transitory computer storage medium | Yoshio Kimura, Takahiro Kitano | 2014-11-18 |
| 8840728 | Imprint system for performing a treatment on a template | Yoshio Kimura, Takahiro Kitano | 2014-09-23 |
| 8522712 | Template treatment method, program, computer storage medium, template treatment apparatus and imprint system | Koukichi Hiroshiro, Takanori Nishi, Takahiro Kitano | 2013-09-03 |
| 8468943 | Imprint method, computer storage medium and imprint apparatus | Koukichi Hiroshiro, Takanori Nishi, Takahiro Kitano | 2013-06-25 |
| 8410697 | Light source device | Kazuhiro Goto, Akihiko Sugitani, Takahiro Toma | 2013-04-02 |
| 7649319 | Ultra-high pressure mercury lamp | Keiichi Matsumoto, Tetsu Okamoto | 2010-01-19 |
| 6563082 | Laser cutting method, laser cutting apparatus, and method and apparatus for manufacturing liquid crystal device | Kazuto Yoshimura, Kenji Masuda, Hidehiro Ito | 2003-05-13 |