Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10236192 | Liquid processing apparatus, liquid processing method, and storage medium | Jun Nonaka, Shogo Mizota, Tatsuya Nagamatsu, Daisuke Saiki, Takashi Yabuta | 2019-03-19 |
| 9627192 | Substrate processing method, substrate processing apparatus, and computer-readable storage medium stored with substrate processing program | Naoyuki Okamura, Kazuki Kosai, Fumihiro Kamimura | 2017-04-18 |