Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538684 | UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly | Mark H. Somervell, Ihsan Simms, Ainhoa Romo Negreira, Kathleen Nafus | 2022-12-27 |
| 10828680 | System and method for enhanced removal of metal hardmask using ultra violet treatment | — | 2020-11-10 |
| 10490402 | UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly | Mark H. Somervell, Ihsan Simms, Ainhoa Romo Negreira, Kathleen Nafus | 2019-11-26 |
| 10490399 | Systems and methodologies for vapor phase hydroxyl radical processing of substrates | Wallace P. Printz | 2019-11-26 |
| 10347503 | Method and hardware for enhanced removal of post etch polymer and hardmask removal | Junjun Liu | 2019-07-09 |
| 10249509 | Substrate cleaning method and system using atmospheric pressure atomic oxygen | — | 2019-04-02 |
| 9966280 | Process gas generation for cleaning of substrates | — | 2018-05-08 |
| 9875916 | Method of stripping photoresist on a single substrate system | — | 2018-01-23 |
| 9852920 | Etch system and method for single substrate processing | Wallace P. Printz | 2017-12-26 |
| 9735026 | Controlling cleaning of a layer on a substrate using nozzles | Wallace P. Printz, Benjamen M. Rathsack | 2017-08-15 |
| 9513556 | Method and system of process chemical temperature control using an injection nozzle | Wallace P. Printz | 2016-12-06 |
| 9454081 | Line pattern collapse mitigation through gap-fill material application | Mark H. Somervell, Benjamen M. Rathsack, Steven Scheer, Joshua Hooge | 2016-09-27 |
| 9327322 | Sonic energy to generate active species for surface preparation, cleaning, and etching | — | 2016-05-03 |
| 9257292 | Etch system and method for single substrate processing | Wallace P. Printz | 2016-02-09 |
| 9075318 | Sequential stage mixing for a resist batch strip process | Wallace P. Printz | 2015-07-07 |
| 8940103 | Sequential stage mixing for single substrate strip processing | — | 2015-01-27 |
| 8795952 | Line pattern collapse mitigation through gap-fill material application | Mark H. Somervell, Benjamen M. Rathsack, Steven Scheer, Joshua Hooge | 2014-08-05 |
| 8083862 | Method and system for monitoring contamination on a substrate | — | 2011-12-27 |
| 7795148 | Method for removing damaged dielectric material | — | 2010-09-14 |
| 7723237 | Method for selective removal of damaged multi-stack bilayer films | Sandra Hyland, Yannick Feurprier | 2010-05-25 |
| 7288483 | Method and system for patterning a dielectric film | — | 2007-10-30 |
| 6820016 | Leak detection apparatus and method | Brynley D. Smith, Andrew Williams | 2004-11-16 |
| 6586510 | Removable emulsion pressure-sensitive adhesives | Graham Yeadon | 2003-07-01 |
| 6547887 | Multilayer pressure-sensitive adhesive label constructions | Chan U. Ko, Luigi Sartor, Carol A. Koch, Paul Keller, Kyung-Won Min +3 more | 2003-04-15 |
| RE36782 | Magnet assembly for use in NMR apparatus | John M. Bird, Ian Leitch McDougall, David L. Black | 2000-07-18 |