Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276455 | Substrate processing apparatus and substrate processing method | Shu Yamamoto, Tomohito Ura, Satoshi Okamura | 2025-04-15 |
| 12237177 | Substrate processing apparatus and substrate processing method | Shogo Fukui, Satoshi Okamura, Tomohito Ura | 2025-02-25 |
| 12237178 | Substrate processing apparatus and substrate processing method | Reijiro Yamanaka | 2025-02-25 |
| 12057327 | Substrate processing apparatus and substrate processing method | Yuichi Douki, Satoshi Biwa, Satoshi Okamura, Katsuhiro Ookawa, Yuichiro KUNUGIMOTO | 2024-08-06 |
| 11901197 | Substrate processing apparatus and substrate processing method | Reijiro Yamanaka | 2024-02-13 |