Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237178 | Substrate processing apparatus and substrate processing method | Masataka Gosho | 2025-02-25 |
| 11901197 | Substrate processing apparatus and substrate processing method | Masataka Gosho | 2024-02-13 |