Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11587805 | Substrate processing apparatus and substrate processing method | Katsunori Ichino, Masanobu Watanabe | 2023-02-21 |
| 11161136 | Liquid processing apparatus and liquid processing method | Yuta Nishiyama, Takeshi Tobimatsu | 2021-11-02 |