Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11257701 | Substrate processing apparatus, substrate processing method and recording medium | Hidekazu Kiyama, Takehiro Kadokura, Takashige Suematsu | 2022-02-22 |
| 10879100 | Substrate transfer device, substrate transfer method and recording medium | Tokutarou Hayashi, Hiroki Harada, Akihiro Teramoto, Tooru Tokimatu, Masahiro Abe | 2020-12-29 |
| 10840213 | Bonding system | Masataka Matsunaga, Takahiro Masunaga, Yasutaka SOMA, Takashi Koga, Shogo HARA +2 more | 2020-11-17 |
| 10424502 | Substrate transfer device and bonding system | Masataka Matsunaga, Takahiro Masunaga, Takashi Koga, Yasuharu Iwashita, Shingo Katsuki +2 more | 2019-09-24 |
| 6973370 | Substrate processing apparatus and method for adjusting a substrate transfer position | Kazuhiko Ito, Jun Ookura, Michio Kinoshita, Yuichi Douki | 2005-12-06 |