Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10256127 | Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium | Tokutarou Hayashi, Yuichi Douki | 2019-04-09 |
| 9507349 | Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium | Tokutarou Hayashi, Yuichi Douki | 2016-11-29 |