Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6054181 | Method of substrate processing to form a film on multiple target objects | Mitsuhiro Nanbu, Naruaki Iida, Masanori Tateyama, Yuji Yoshimoto, Tomoko Ishimoto +6 more | 2000-04-25 |
| 5725664 | Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections | Mitsuhiro Nanbu, Naruaki Iida, Masanori Tateyama, Yuji Yoshimoto, Tomoko Ishimoto +6 more | 1998-03-10 |
| 5565034 | Apparatus for processing substrates having a film formed on a surface of the substrate | Mitsuhiro Nanbu, Naruaki Iida, Masanori Tateyama, Yuji Yoshimoto, Tomoko Ishimoto +6 more | 1996-10-15 |