HT

Hirofumi Takeguchi

TL Tokyo Electron Limited: 28 patents #148 of 5,567Top 3%
Overall (All Time): #137,323 of 4,157,543Top 4%
28
Patents All Time

Issued Patents All Time

Showing 26–28 of 28 patents

Patent #TitleCo-InventorsDate
6991385 Method for developing processing and apparatus for supplying developing solution Kousuke Yoshihara, Keiichi Tanaka, Taro Yamamoto, Hideharu Kyouda, Atsushi Ookouchi 2006-01-31
6811962 Method for developing processing and apparatus for supplying developing solution Kousuke Yoshihara, Keiichi Tanaka, Taro Yamamoto, Hideharu Kyouda, Atsushi Ookouchi 2004-11-02
6709174 Apparatus and method for development Taro Yamamoto, Akihiro Fujimoto, Kousuke Yoshihara, Hideharu Kyouda 2004-03-23