Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11036140 | Substrate processing apparatus, substrate processing method and recording medium | Shinichiro KAWAKAMI, Yohei SANO, Takashi Yamauchi, Masashi Enomoto | 2021-06-15 |
| 10955743 | Substrate processing apparatus, substrate processing method and computer-readable recording medium | Yohei SANO, Shinichiro KAWAKAMI | 2021-03-23 |
| 10732508 | Coating and developing method and coating and developing apparatus | Shinichiro KAWAKAMI | 2020-08-04 |
| 10394125 | Coating and developing method and coating and developing apparatus | Shinichiro KAWAKAMI | 2019-08-27 |
| 10139732 | Substrate processing apparatus, substrate processing method and recording medium | Shinichiro KAWAKAMI, Shinichi Hatakeyama | 2018-11-27 |