Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298668 | Heat treatment apparatus and heat treatment method | Shinichiro KAWAKAMI, Yohei SANO | 2025-05-13 |
| 10656526 | Substrate treatment method and thermal treatment apparatus | Yohei SANO, Shinichiro KAWAKAMI, Masashi Enomoto, Takahiro Shiozawa, Keisuke Yoshida | 2020-05-19 |