Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9576829 | Process liquid supply apparatus operating method, process liquid supply apparatus and non-transitory storage medium | Hiroshi Marumoto, Kenji Adachi | 2017-02-21 |
| 9508574 | Process liquid supply apparatus operating method, process liquid supply apparatus and non-transitory storage medium | Hiroshi Marumoto, Kenji Adachi | 2016-11-29 |
| 9162247 | Coating and development treatment system with airflow control including control unit and movable airflow control plate | Kousuke Yoshihara, Shinichi Hatakeyama, Kohei Kawakami | 2015-10-20 |
| 9165763 | Coating treatment method | Katsunori Ichino, Tomohiro Noda | 2015-10-20 |
| 8851011 | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | Kousuke Yoshihara, Tomohiro Iseki | 2014-10-07 |
| 8501274 | Coating treatment method, computer storage medium, and coating treatment apparatus | Katsunori Ichino, Tomohiro Noda | 2013-08-06 |
| 8414972 | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | Kousuke Yoshihara, Tomohiro Iseki | 2013-04-09 |
| 8375887 | Solution treatment apparatus, solution treatment method and resist coating method | Naofumi Kishita | 2013-02-19 |
| 8318247 | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | Kousuke Yoshihara, Tomohiro Iseki | 2012-11-27 |
| 8304018 | Coating method | Tomohiro Iseki, Katsunori Ichino, Kousuke Yoshihara | 2012-11-06 |
| D610176 | Coater cup | Shuichi Nagamine, Naofumi Kishita, Yuichiro MIYATA, Yasushi Takiguchi | 2010-02-16 |