Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887818 | Methods and systems to modulate film stress | Tsutomu Tanaka, John C. Forster, Kenichi Ohno, Ning Li, Mihaela Balseanu +2 more | 2024-01-30 |
| 11158489 | Methods and systems to modulate film stress | Tsutomu Tanaka, John C. Forster, Kenichi Ohno, Ning Li, Mihaela Balseanu +2 more | 2021-10-26 |