Issued Patents All Time
Showing 26–50 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741559 | Film forming method, computer storage medium, and film forming system | Satoru Shimura, Fumiko Iwao | 2017-08-22 |
| 9731226 | Solution treatment apparatus and solution treatment method | Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2017-08-15 |
| 9732910 | Processing-liquid supply apparatus and processing-liquid supply method | Koji Takayanagi, Yuichi Terashita, Toshinobu Furusho, Takashi Sasa | 2017-08-15 |
| 9704730 | Substrate cleaning apparatus, substrate cleaning method and non-transitory storage medium | Atsushi Ookouchi, Hiroshi Ichinomiya, Hirosi Nisihata | 2017-07-11 |
| 9690202 | Developing method, developing apparatus and storage medium | Yuichi Terashita, Hirofumi Takeguchi, Takeshi Shimoaoki, Tomohiro Iseki | 2017-06-27 |
| 9627232 | Substrate processing method, substrate processing apparatus and non-transitory storage medium | Keiichi Tanaka, Tomohiro Iseki | 2017-04-18 |
| 9613836 | Coating film forming apparatus, coating film forming method, and recording medium | Katsunori Ichino, Yuichi Terashita | 2017-04-04 |
| 9575411 | Developing apparatus, developing method and storage medium | Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi | 2017-02-21 |
| 9568829 | Developing method, developing apparatus and storage medium | Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi, Masahiro Fukuda | 2017-02-14 |
| 9307653 | Substrate cleaning method, substrate cleaning apparatus and storage medium for cleaning substrate | Keiichi Tanaka, Hiroshi Ichinomiya | 2016-04-05 |
| 9293320 | Liquid treatment apparatus and method and non-transitory storage medium | Yuichi Yoshida | 2016-03-22 |
| 9256131 | Developing method for developing apparatus | Hirofumi Takeguchi, Taro Yamamoto | 2016-02-09 |
| 9217922 | Liquid processing apparatus, liquid processing method and storage medium for liquid processing | Minoru Kubota, Kouzou Tachibana | 2015-12-22 |
| 9162247 | Coating and development treatment system with airflow control including control unit and movable airflow control plate | Koji Takayanagi, Shinichi Hatakeyama, Kohei Kawakami | 2015-10-20 |
| 9165797 | Liquid processing apparatus, liquid processing method, and storage medium | Yuichi Yoshida, Soichiro Okada | 2015-10-20 |
| 9086190 | Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus | Toshinobu Furusho, Takahiro Ookubo, Yusuke Yamamoto, Steffen Hornig | 2015-07-21 |
| 8980013 | Substrate cleaning method and substrate cleaning apparatus | Yuichi Yoshida, Taro Yamamoto | 2015-03-17 |
| 8956694 | Developing apparatus, developing method and storage medium | Hirofumi Takeguchi, Tomohiro Iseki, Yuichi Yoshida | 2015-02-17 |
| 8940649 | Coating treatment method, non-transitory computer storage medium and coating treatment apparatus | Shinichi Hatakeyama | 2015-01-27 |
| 8865396 | Developing method and developing apparatus | Hirofumi Takeguchi, Taro Yamamoto | 2014-10-21 |
| 8851011 | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | Tomohiro Iseki, Koji Takayanagi | 2014-10-07 |
| 8791030 | Coating treatment method and coating treatment apparatus | Fumiko Iwao, Satoru Shimura | 2014-07-29 |
| 8691336 | Coating treatment method, non-transitory computer storage medium and coating treatment apparatus | Katsunori Ichino | 2014-04-08 |
| 8678684 | Developing method | Taro Yamamoto, Yuichi Yoshida | 2014-03-25 |
| 8506186 | Coating and developing apparatus, coating and developing method and non-transitory tangible medium | Shinichi Hayashi, Yuichi Douki, Akira Miyata, Yuuichi Yamamoto, Nobuaki Matsuoka +1 more | 2013-08-13 |