Issued Patents All Time
Showing 76–95 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7896562 | Developing method, developing apparatus and storage medium | Taro Yamamoto, Hirofumi Takeguchi, Atsushi Ookouchi | 2011-03-01 |
| 7841787 | Rinsing method, developing method, developing system and computer-read storage medium | Hirofumi Takeguchi, Junji Nakamura | 2010-11-30 |
| 7823534 | Development device and development method | Atsushi Ookouchi, Taro Yamamoto, Hirofumi Takeguchi, Hideharu Kyouda | 2010-11-02 |
| 7820243 | Resist coating method and resist coating apparatus | Tomohiro Iseki | 2010-10-26 |
| 7806076 | Developing apparatus and method | Taro Yamamoto, Atsushi Ookouchi, Hirofumi Takeguchi | 2010-10-05 |
| 7802536 | Apparatus and method of forming an applied film | Hiroichi Inada | 2010-09-28 |
| 7775729 | Developing apparatus, developing processing method, developing processing program, and computer readable recording medium recording the program | — | 2010-08-17 |
| 7742146 | Coating and developing method, coating and developing system and storage medium | Hideharu Kyouda, Taro Yamamoto | 2010-06-22 |
| 7604013 | Substrate cleaning method and developing apparatus | Junji Nakamura, Kentaro Yamamura, Fumiko Iwao, Hirofumi Takeguchi | 2009-10-20 |
| 7601933 | Heat processing apparatus and heat processing method | Yuichi Terashita, Momoko Shizukuishi, Atsushi Ookouchi, Hideharu Kyouda | 2009-10-13 |
| 7384595 | Heat-treating apparatus and heat-treating method | Kazuhiko Ooshima, Yuichi Terashita, Momoko Shizukuishi, Hideo Shite | 2008-06-10 |
| 7208066 | Substrate processing apparatus and substrate processing method | Junichi Kitano, Yuji Matsuyama, Takahiro Kitano, Takayuki Katano, Hidefumi Matsui +7 more | 2007-04-24 |
| 6991385 | Method for developing processing and apparatus for supplying developing solution | Keiichi Tanaka, Taro Yamamoto, Hideharu Kyouda, Hirofumi Takeguchi, Atsushi Ookouchi | 2006-01-31 |
| 6869640 | Coating film forming method and coating film forming apparatus | Yuichi Terashita | 2005-03-22 |
| 6848625 | Process liquid supply mechanism and process liquid supply method | Takashi Takekuma, Toshinobu Furusho, Takeshi Ohto, Hiroyuki Miyamoto, Shinya Hori +1 more | 2005-02-01 |
| 6811962 | Method for developing processing and apparatus for supplying developing solution | Keiichi Tanaka, Taro Yamamoto, Hideharu Kyouda, Hirofumi Takeguchi, Atsushi Ookouchi | 2004-11-02 |
| 6709174 | Apparatus and method for development | Taro Yamamoto, Akihiro Fujimoto, Hideharu Kyouda, Hirofumi Takeguchi | 2004-03-23 |
| 6673151 | Substrate processing apparatus | Akihiro Fujimoto | 2004-01-06 |
| 6578772 | Treatment solution supply apparatus and treatment solution supply method | Akihiro Fujimoto, Masahiro Enomoto | 2003-06-17 |
| 6527860 | Substrate processing apparatus | Akihiro Fujimoto | 2003-03-04 |