Issued Patents All Time
Showing 51–75 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8505479 | Resist coating apparatus | Tomohiro Iseki | 2013-08-13 |
| 8496991 | Coating treatment method | Tomohiro Iseki | 2013-07-30 |
| 8480319 | Coating and developing apparatus, coating and developing method and non-transitory tangible medium | Shinichi Hayashi, Yuichi Douki, Akira Miyata, Yuuichi Yamamoto, Nobuaki Matsuoka +1 more | 2013-07-09 |
| 8445189 | Developing device and developing method | Taro Yamamoto, Hideharu Kyouda, Hirofumi Takeguchi, Atsushi Ookouchi | 2013-05-21 |
| 8414972 | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | Tomohiro Iseki, Koji Takayanagi | 2013-04-09 |
| 8398319 | Developing apparatus, developing method, and storage medium | Hiroshi Arima, Yuichi Yoshida, Taro Yamamoto | 2013-03-19 |
| 8393808 | Developing method | Taro Yamamoto, Yuichi Yoshida | 2013-03-12 |
| 8387630 | Protective film removing device, mixed chemical solution recovering method and program storage medium | Taro Yamamoto | 2013-03-05 |
| 8337104 | Developing apparatus, developing method and storage medium | Yasushi Takiguchi, Taro Yamamoto, Hiroshi Arima, Yuichi Yoshida | 2012-12-25 |
| 8333522 | Developing apparatus, developing method and storage medium | Hiroshi Arima, Yuichi Yoshida, Yasushi Takiguchi, Taro Yamamoto | 2012-12-18 |
| 8318247 | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | Tomohiro Iseki, Koji Takayanagi | 2012-11-27 |
| 8304018 | Coating method | Koji Takayanagi, Tomohiro Iseki, Katsunori Ichino | 2012-11-06 |
| 8287954 | Apparatus and method of forming an applied film | Hiroichi Inada | 2012-10-16 |
| 8262300 | Coating and developing apparatus, developing method and non-transitory medium | Yasushi Takiguchi, Taro Yamamoto, Hiroshi Arima, Yuichi Yoshida | 2012-09-11 |
| 8225738 | Resist coating method and resist coating apparatus | Tomohiro Iseki | 2012-07-24 |
| 8216389 | Substrate cleaning method and substrate cleaning apparatus | Yuichi Yoshida, Taro Yamamoto | 2012-07-10 |
| 8147153 | Rinsing method, developing method, developing system and computer-read storage medium | Hirofumi Takeguchi, Junji Nakamura | 2012-04-03 |
| 8105738 | Developing method | — | 2012-01-31 |
| 8069816 | Coating film processing method and apparatus | Taro Yamamoto | 2011-12-06 |
| 8043657 | Coating treatment method | Tomohiro Iseki | 2011-10-25 |
| 8029624 | Rinse method and developing apparatus | Junji Nakamura, Hirofumi Takeguchi, Taro Yamamoto | 2011-10-04 |
| 8026048 | Developing apparatus and developing method | Atsushi Ookouchi, Taro Yamamoto, Hirofumi Takeguchi, Hideharu Kyouda | 2011-09-27 |
| 7918182 | Developing device and developing method | Taro Yamamoto, Hideharu Kyouda, Hirofumi Takeguchi, Atsushi Ookouchi | 2011-04-05 |
| 7906173 | Resist coating method and resist coating apparatus | Tomohiro Iseki | 2011-03-15 |
| 7901514 | Substrate cleaning method and developing apparatus | Junji Nakamura, Kentaro Yamamura, Fumiko Iwao, Hirofumi Takeguchi | 2011-03-08 |