Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9459535 | Method of forming pattern | Naoto Motoike, Katsumi Ohmori, Hidetami Yaegashi, Kenichi Oyama | 2016-10-04 |
| 9244349 | Positive resist composition and method of forming resist pattern | Takayoshi Mori | 2016-01-26 |
| 9244347 | Resist composition, compound, polymeric compound and method of forming resist pattern | Yoshitaka Komuro, Takaaki Kaiho, Akiya Kawaue, Junichi Tsuchiya, Yoshiyuki Utsumi | 2016-01-26 |
| 9188863 | Resist composition and method of forming resist pattern | Yoshiyuki Utsumi | 2015-11-17 |
| 9164380 | Resist composition and method of forming resist pattern | Yoshitaka Komuro, Yoshiyuki Utsumi, Akiya Kawaue | 2015-10-20 |
| 9063416 | Resist composition, method of forming resist pattern and compound | Yoshitaka Komuro, Yoshiyuki Utsumi, Akiya Kawaue | 2015-06-23 |
| 9045398 | Sulfonium salt and photo-acid generator | Issei Suzuki, Takuya Ikeda, Yusaku Takashima, Takeshi Furuta, Yoshitaka Komuro +2 more | 2015-06-02 |
| 8785106 | Resist composition and method of forming resist pattern | Yoshitaka Komuro | 2014-07-22 |
| 8354218 | Resist composition and method of forming resist pattern | Isao Hirano | 2013-01-15 |