Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11977330 | Resist composition and method of forming resist pattern | Yasuo SOMEYA, Minoru ADEGAWA | 2024-05-07 |
| 10838301 | Resist composition, method of forming resist pattern, fluorine-containing compound, and compound | Tomoyuki Hirano | 2020-11-17 |
| 9244347 | Resist composition, compound, polymeric compound and method of forming resist pattern | Yoshitaka Komuro, Toshiaki Hato, Akiya Kawaue, Junichi Tsuchiya, Yoshiyuki Utsumi | 2016-01-26 |
| 9133102 | Resist composition, method of forming resist pattern and polymeric compound | Daichi Takaki, Daiju Shiono, Yoshiyuki Utsumi | 2015-09-15 |
| 9045398 | Sulfonium salt and photo-acid generator | Issei Suzuki, Takuya Ikeda, Yusaku Takashima, Takeshi Furuta, Yoshitaka Komuro +2 more | 2015-06-02 |
| 9040224 | Resist composition, method of forming resist pattern and compound | Akiya Kawaue, Tsuyoshi Nakamura | 2015-05-26 |
| 8987386 | Method of producing polymeric compound, resist composition, and method of forming resist pattern | Yoshiyuki Utsumi, Takahiro Dazai, Masatoshi Arai | 2015-03-24 |
| 8685620 | Resist composition, method of forming resist pattern and polymeric compound | Daichi Takaki, Daiju Shiono, Yoshiyuki Utsumi | 2014-04-01 |