Issued Patents All Time
Showing 1–25 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10066096 | Method of producing structure containing phase-separated structure and resin composition for forming phase-separated structure | Tsuyoshi Kurosawa, Tasuku Matsumiya, Masahito Yahagi, Hitoshi Yamano, Ken Miyagi +2 more | 2018-09-04 |
| 9834696 | Undercoat agent and method of forming pattern of layer containing block copolymer | Takahiro Senzaki, Ken Miyagi, Tsuyoshi Kurosawa, Tasuku Matsumiya, Kenichiro Miyashita +1 more | 2017-12-05 |
| 9816003 | Method of producing structure containing phase-separated structure | Tsuyoshi Kurosawa, Ken Miyagi, Tasuku Matsumiya, Hitoshi Yamano, Taku Hirayama +1 more | 2017-11-14 |
| 9499646 | Negative resist composition, method of forming resist pattern and complex | Naoki Yamashita, Yoshitaka Komuro, Yoshiyuki Utsumi | 2016-11-22 |
| 9475088 | Method of producing structure containing phase-separated structure, phase separated structure, and block copolymer composition | Tsuyoshi Kurosawa, Ken Miyagi, Tasuku Matsumiya, Kenichiro Miyashita, Katsumi Ohmori | 2016-10-25 |
| 9442371 | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern | Takehiro Seshimo, Takaya Maehashi, Takahiro Dazai, Yoshiyuki Utsumi, Tasuku Matsumiya +2 more | 2016-09-13 |
| 9366960 | Negative resist composition, method of forming resist pattern, and complex | Naoki Yamashita, Yoshitaka Komuro, Yoshiyuki Utsumi | 2016-06-14 |
| 9250531 | Method of forming resist pattern and negative tone-development resist composition | Tomoyuki Hirano, Daichi Takaki, Kenri Konno, Isamu Takagi | 2016-02-02 |
| 9169421 | Method of producing structure containing phase-separated structure, method of forming pattern, and top coat material | Tasuku Matsumiya, Takehiro Seshimo, Katsumi Ohmori, Ken Miyagi, Kenichiro Miyashita +2 more | 2015-10-27 |
| 9133102 | Resist composition, method of forming resist pattern and polymeric compound | Daichi Takaki, Yoshiyuki Utsumi, Takaaki Kaiho | 2015-09-15 |
| 9023581 | Resist composition, method of forming resist pattern, polymeric compound, and compound | Akiya Kawaue, Kazushige Dohtani, Yoshiyuki Utsumi, Jun Iwashita, Kenri Konno +1 more | 2015-05-05 |
| 9023580 | Method of forming polymeric compound, resist composition and method of forming resist pattern | Tomoyuki Hirano, Takahiro Dazai | 2015-05-05 |
| 9012125 | Resist composition and method of forming resist pattern | Shinji Kumada, Satoshi Maemori, Masatoshi Arai | 2015-04-21 |
| 8986919 | Resist composition, method of forming resist pattern and polymeric compound | Daichi Takaki, Masatoshi Arai, Jun Iwashita, Kenri Konno | 2015-03-24 |
| 8980524 | Positive resist composition and method of forming resist pattern | Tomoyuki Hirano, Masatoshi Arai | 2015-03-17 |
| 8927191 | Resist composition, method of forming resist pattern and polymeric compound | Junichi Tsuchiya, Daichi Takaki, Masatoshi Arai, Tomoyuki Hirano | 2015-01-06 |
| 8911928 | Resist composition, method of forming resist pattern, polymeric compound and method of producing the same | Tomoyuki Hirano, Daichi Takaki, Junichi Tsuchiya | 2014-12-16 |
| 8846838 | Fluorine-containing block copolymeric compound | Tasuku Matsumiya, Tomoyuki Hirano, Takahiro Dazai | 2014-09-30 |
| 8778595 | Resist composition, method of forming resist pattern, and polymeric compound | Daichi Takaki, Yoshiyuki Utsumi, Jun Iwashita | 2014-07-15 |
| 8742038 | Resist composition for immersion exposure, method of forming resist pattern using the same, and fluorine-containing compound | Takahiro Dazai, Sanae Furuya, Tomoyuki Hirano, Takayoshi Mori | 2014-06-03 |
| 8735045 | Positive resist composition, method of forming resist pattern, and polymeric compound | Tomoyuki Hirano, Daichi Takaki | 2014-05-27 |
| 8685620 | Resist composition, method of forming resist pattern and polymeric compound | Daichi Takaki, Yoshiyuki Utsumi, Takaaki Kaiho | 2014-04-01 |
| 8658343 | Resist composition, and method of forming resist pattern | Masatoshi Arai, Junichi Tsuchiya, Tomoyuki Hirano, Daichi Takaki | 2014-02-25 |
| 8642244 | Resist composition for immersion exposure, method of forming resist pattern using the same, and fluorine-containing compound | Takahiro Dazai, Sanae Furuya, Tomoyuki Hirano, Takayoshi Mori | 2014-02-04 |
| 8632960 | Method of forming resist pattern and negative tone-development resist composition | Tomoyuki Hirano, Takahiro Dazai, Sho Abe | 2014-01-21 |