Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11747724 | Organically modified metal oxide nanoparticles, organically modified metal oxide nanoparticles-containing solution, organically modified metal oxide nanoparticles-containing resist composition, and resist pattern forming method | Kiwamu Sue, Sho KATAOKA, Yusuke YOSHIGOE, Takatoshi Inari, Masatoshi Arai +2 more | 2023-09-05 |
| 11709425 | Resist composition and method of forming resist pattern | Yoshitaka Komuro | 2023-07-25 |
| 11560444 | Method of producing block copolymer capable of creating specific structure pattern | Teruaki Hayakawa, Seina Yamazaki, Akiyoshi Yamazaki, Daisuke Kawana, Yoshitaka Komuro +1 more | 2023-01-24 |
| 11448963 | Resist composition and method of forming resist pattern | Masatoshi Arai, Koshi Onishi | 2022-09-20 |
| 11275307 | Resist composition, method of forming resist pattern, polymeric compound, and compound | Masatoshi Arai, Koshi Onishi | 2022-03-15 |
| 10649330 | Resist composition, method of forming resist pattern, compound, and acid generator | Masatoshi Arai, Takuya Ikeda | 2020-05-12 |
| 10414918 | Method of preparing polymer compound | Yoshitaka Komuro, Masatoshi Arai, Koshi Onishi, KhanhTin Nguyen, Masahiro SHIOSAKI +1 more | 2019-09-17 |
| 10295905 | Resist composition, method for forming resist pattern, and polymer compound | Yoshitaka Komuro, Masatoshi Arai, Koshi Onishi, KhanhTin Nguyen | 2019-05-21 |
| 10179866 | Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure | Akiya Kawaue, Takehiro Seshimo, Tasuku Matsumiya, Ken Miyagi, Hitoshi Yamano +2 more | 2019-01-15 |
| 9914847 | Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure | Akiya Kawaue, Takehiro Seshimo, Tasuku Matsumiya, Ken Miyagi, Hitoshi Yamano +2 more | 2018-03-13 |
| 9828519 | Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure | Akiya Kawaue, Takehiro Seshimo, Tasuku Matsumiya, Ken Miyagi, Hitoshi Yamano +2 more | 2017-11-28 |
| 9776208 | Brush composition, and method of producing structure containing phase-separated structure | Masahito Yahagi, Akiya Kawaue, Issei Suzuki, Tasuku Matsumiya, Tsuyoshi Kurosawa +1 more | 2017-10-03 |
| 9644110 | Method of producing structure containing phase-separated structure and method of forming top coat film | Takehiro Seshimo, Takahiro Dazai, Yoshiyuki Utsumi | 2017-05-09 |
| 9567477 | Undercoat agent and method of producing structure containing phase-separated structure | Takehiro Seshimo, Tasuku Matsumiya, Takahiro Dazai, Yoshiyuki Utsumi | 2017-02-14 |
| 9557647 | Resist composition and method of forming resist pattern | Yoshitaka Komuro, Takashi Nagamine | 2017-01-31 |
| 9442371 | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern | Takehiro Seshimo, Takahiro Dazai, Yoshiyuki Utsumi, Tasuku Matsumiya, Ken Miyagi +2 more | 2016-09-13 |
| 9206307 | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern | Tasuku Matsumiya, Takehiro Seshimo, Ken Miyagi, Takahiro Dazai, Yoshiyuki Utsumi | 2015-12-08 |
| 9188869 | Method of producing structure containing phase-separation structure, method of forming pattern, and method of forming fine pattern | Takehiro Seshimo, Takahiro Dazai, Ken Miyagi, Yoshiyuki Utsumi | 2015-11-17 |