Issued Patents All Time
Showing 1–25 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11347147 | Metal-containing onium salt compound, photodegradable base, resist composition, and method for manufacturing device using said resist composition | Michiya Naito, Masamichi Hayakawa | 2022-05-31 |
| 11048166 | Photosensitive compound, photoacid generator and resist composition containing the photosensitive compound, and method for manufacturing device using the resist composition | Michiya Naito, Masamichi Hayakawa | 2021-06-29 |
| 10216084 | Sulfonic acid derivative, photoacid generator using same, resist composition, and device manufacturing method | Noriaki Kobayashi, Takahiro Kamakura | 2019-02-26 |
| 9862695 | Monomer having N-acyl carbamoyl group and lactone skeleton, and polymeric compound | Hiroshi Koyama, Masamichi Nishimura, Naoki Yamashita, Yoshitaka Komuro, Tomoyuki Hirano | 2018-01-09 |
| 9778567 | Resist composition, method of forming resist pattern, polymeric compound, compound | Masatoshi Arai | 2017-10-03 |
| 9644110 | Method of producing structure containing phase-separated structure and method of forming top coat film | Takehiro Seshimo, Takaya Maehashi, Takahiro Dazai | 2017-05-09 |
| 9618842 | Resist composition and method of forming resist pattern | Makiko Irie | 2017-04-11 |
| 9606433 | Resist composition, method of forming resist pattern, polymeric compound and compound | Masatoshi Arai, Takahiro Dazai, Yoshitaka Komuro | 2017-03-28 |
| 9567477 | Undercoat agent and method of producing structure containing phase-separated structure | Takehiro Seshimo, Tasuku Matsumiya, Takaya Maehashi, Takahiro Dazai | 2017-02-14 |
| 9499646 | Negative resist composition, method of forming resist pattern and complex | Naoki Yamashita, Yoshitaka Komuro, Daiju Shiono | 2016-11-22 |
| 9469712 | Method of producing polymeric compound, resist composition and method of forming resist pattern | Tomoyuki Hirano, Junichi Tsuchiya, Yoichi Hori | 2016-10-18 |
| 9442371 | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern | Takehiro Seshimo, Takaya Maehashi, Takahiro Dazai, Tasuku Matsumiya, Ken Miyagi +2 more | 2016-09-13 |
| 9383642 | Polymerization method of high-molecular weight compound, resist composition, and method for forming resist pattern | Takahiro Dazai, Masatoshi Arai | 2016-07-05 |
| 9366960 | Negative resist composition, method of forming resist pattern, and complex | Naoki Yamashita, Yoshitaka Komuro, Daiju Shiono | 2016-06-14 |
| 9354515 | Resist composition, acid generator, polymeric compound and method of forming resist pattern | Takashi Nagamine, Yoshitaka Komuro, Masatoshi Arai | 2016-05-31 |
| 9244347 | Resist composition, compound, polymeric compound and method of forming resist pattern | Yoshitaka Komuro, Takaaki Kaiho, Toshiaki Hato, Akiya Kawaue, Junichi Tsuchiya | 2016-01-26 |
| 9206307 | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern | Tasuku Matsumiya, Takehiro Seshimo, Ken Miyagi, Takaya Maehashi, Takahiro Dazai | 2015-12-08 |
| 9188863 | Resist composition and method of forming resist pattern | Toshiaki Hato | 2015-11-17 |
| 9188869 | Method of producing structure containing phase-separation structure, method of forming pattern, and method of forming fine pattern | Takehiro Seshimo, Takahiro Dazai, Takaya Maehashi, Ken Miyagi | 2015-11-17 |
| 9164380 | Resist composition and method of forming resist pattern | Yoshitaka Komuro, Akiya Kawaue, Toshiaki Hato | 2015-10-20 |
| 9164379 | Resist composition, method for forming resist pattern, and compound | Yoshitaka Komuro, Tomoyuki Hirano | 2015-10-20 |
| 9133102 | Resist composition, method of forming resist pattern and polymeric compound | Daichi Takaki, Daiju Shiono, Takaaki Kaiho | 2015-09-15 |
| 9122157 | Resist composition and method for forming resist pattern | Masatoshi Arai, Takahiro Dazai | 2015-09-01 |
| 9097971 | Compound, radical polymerization initiator, method for producing compound, polymer, resist composition, and method for forming resist pattern | Takahiro Dazai, Jun Iwashita, Kenri Konno | 2015-08-04 |
| 9097969 | Compound, resist composition and method of forming resist pattern | Hideto Nito | 2015-08-04 |