Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9618843 | Resist composition and method of forming resist pattern | Kensuke Matsuzawa | 2017-04-11 |
| 9104101 | Resist composition, method of forming resist pattern and polymeric compound | Kensuke Matsuzawa, Yoshitaka Komuro, Masatoshi Arai | 2015-08-11 |
| 9097971 | Compound, radical polymerization initiator, method for producing compound, polymer, resist composition, and method for forming resist pattern | Yoshiyuki Utsumi, Takahiro Dazai, Kenri Konno | 2015-08-04 |
| 9057948 | Resist composition for EUV or EB, and method of forming resist pattern | Kenri Konno, Daisuke Kawana, Tatsuya Fujii, Kenta Suzuki | 2015-06-16 |
| 9023581 | Resist composition, method of forming resist pattern, polymeric compound, and compound | Akiya Kawaue, Kazushige Dohtani, Yoshiyuki Utsumi, Kenri Konno, Daiju Shiono +1 more | 2015-05-05 |
| 8986919 | Resist composition, method of forming resist pattern and polymeric compound | Daichi Takaki, Daiju Shiono, Masatoshi Arai, Kenri Konno | 2015-03-24 |
| 8883396 | Resist composition and method of forming resist pattern | Masahito Yahagi | 2014-11-11 |
| 8795948 | Resist composition, method of forming resist pattern and polymeric compound | Takahiro Dazai, Yoshiyuki Utsume, Kensuke Matsuzawa, Kenri Konno | 2014-08-05 |
| 8778595 | Resist composition, method of forming resist pattern, and polymeric compound | Daichi Takaki, Daiju Shiono, Yoshiyuki Utsumi | 2014-07-15 |
| 8586281 | Positive resist composition and method of forming resist pattern | Masahito Yahagi, Kenri Konno, Isamu Takagi | 2013-11-19 |
| 8574809 | Positive resist composition and method of forming resist pattern | Takeyoshi Mimura | 2013-11-05 |
| 8268530 | Positive resist composition, method of forming resist pattern, polymeric compound, and compound | Yoshiyuki Utsumi | 2012-09-18 |
| 8232040 | Positive resist composition and method of forming resist pattern | Takeyoshi Mimura | 2012-07-31 |
| 8198004 | Resist composition | Taku Hirayama, Hideo Hada, Satoshi Fujimura, Takeshi Iwai, Mitsuru Sato +6 more | 2012-06-12 |
| 8043795 | Method of forming resist pattern | — | 2011-10-25 |
| 8034536 | Resist composition and method of forming resist pattern | Shogo Matsumaru, Sho Abe | 2011-10-11 |
| 8021824 | Polymer compound, resist composition and method of forming resist pattern | Sho Abe, Makiko Irie, Takeshi Iwai | 2011-09-20 |
| 7939243 | Resin, resist composition and method of forming resist pattern | Masaru Takeshita, Takeshi Iwai, Yuji Ohgomori | 2011-05-10 |
| 7820360 | Polymer compound, negative resist composition, and method of forming resist pattern | Ayako Kusaka | 2010-10-26 |
| 7709179 | Negative resist composition and method for forming resist pattern | — | 2010-05-04 |
| 7598017 | Negative resist composition and method of forming resist pattern | Kazuhito Sasaki, Sho Abe | 2009-10-06 |
| 7582409 | Negative resist composition and method of forming resist pattern | Ayako Kusaka | 2009-09-01 |
| 7541138 | Resist composition | Taku Hirayama, Hideo Hada, Satoshi Fujimura, Takeshi Iwai, Mitsuru Sato +6 more | 2009-06-02 |
| 7527909 | Resist composition | Taku Hirayama, Hideo Hada, Satoshi Fujimura, Takeshi Iwai, Mitsuru Sato +6 more | 2009-05-05 |
| 7501220 | Resist composition | Taku Hirayama, Hideo Hada, Satoshi Fujimura, Takeshi Iwai, Mitsuru Sato +6 more | 2009-03-10 |