Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10324377 | Resist composition and method of forming resist pattern | Taku Hirayama, Daisuke Kawana, Yoshitaka Komuro, Masatoshi Arai, Kenta Suzuki +2 more | 2019-06-18 |
| 10101658 | Resist composition and method of forming resist pattern | Taku Hirayama, Daisuke Kawana, Kenta Suzuki, Takashi Kamizono, Masahito Yahagi +1 more | 2018-10-16 |
| 8349543 | Pattern-forming method, metal oxide film-forming material and method for using the metal oxide film-forming material | Ryoji Watanabe, Toshiyuki Ogata | 2013-01-08 |
| 8304163 | Compound, dissolution inhibitor, positive type resist composition, and method of forming resist pattern | Daiju Shiono, Taku Hirayama, Toshiyuki Ogata, Hideo Hada | 2012-11-06 |
| 8101013 | Film-forming material and method of forming pattern | Hideo Hada, Shingenori Fujikawa, Toyoki Kunitake | 2012-01-24 |
| 8034536 | Resist composition and method of forming resist pattern | Jun Iwashita, Sho Abe | 2011-10-11 |
| 7943284 | Compound, dissolution inhibitor, positive type resist composition, and method of forming resist pattern | Daiju Shiono, Taku Hirayama, Toshiyuki Ogata, Hideo Hada | 2011-05-17 |
| 7932013 | Pattern coating material and pattern forming method | Toshiyuki Ogata, Kiyoshi Ishikawa, Hideo Hada, Shigenori Fujikawa, Toyoki Kunitake | 2011-04-26 |
| 7851127 | Polymer compound, positive resist composition and resist pattern forming method | Toshiyuki Ogata, Hideo Hada | 2010-12-14 |
| 7829259 | Resin for photoresist composition, photoresist composition and method for forming resist pattern | Hideo Hada, Masaru Takeshita, Hiroaki Shimizu | 2010-11-09 |
| 7592123 | Resin for photoresist composition, photoresist composition and method for forming resist pattern | Hideo Hada, Masaru Takeshita, Hiroaki Shimizu | 2009-09-22 |
| 7482108 | Polymer compound, acid generator, positive resist composition, and method for formation of resist patterns | Masaru Takeshita, Takeshi Iwai, Hideo Hada | 2009-01-27 |