Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12099298 | Resist composition and method of forming resist pattern | Kazufumi Sato, Masahito Yahagi | 2024-09-24 |
| 9411224 | Method of forming resist pattern | Jiro Yokoya, Tsuyoshi Nakamura, Hiroaki Shimizu, Hideto Nito, Hirokuni Saito | 2016-08-09 |
| 9023577 | Resist composition and method of forming resist pattern | Hirokuni Saito, Jiro Yokoya, Tsuyoshi Nakamura | 2015-05-05 |
| 8975010 | Method of forming resist pattern | — | 2015-03-10 |
| 8877432 | Method of forming resist pattern and resist composition | Jiro Yokoya, Tsuyoshi Nakamura, Yasuhiro Yoshii, Hirokuni Saito | 2014-11-04 |
| 8614049 | Resist composition and method of forming resist pattern | Yoshiyuki Utsumi, Hiroaki Shimizu, Syo Abe, Yoshitaka Komuro | 2013-12-24 |
| 8580481 | Resist polymer and resist composition | Hikaru Momose, Atsushi Ootake, Akifumi Ueda, Tadayuki Fujiwara, Ryotaro Hayashi +1 more | 2013-11-12 |
| 8535868 | Positive resist composition and method of forming resist pattern | Yoshiyuki Utsumi | 2013-09-17 |
| 8530598 | Resist composition for immersion exposure, method of forming resist pattern, and fluorine-containing resin | Yasuhiro Yoshii | 2013-09-10 |
| 8497395 | Compound | Yoshiyuki Utsumi, Yoshitaka Komuro | 2013-07-30 |
| 8486605 | Positive resist composition and method of forming resist pattern | Yasuhiro Yoshii, Jiro Yokoya, Hirokuni Saito, Tsuyoshi Nakamura | 2013-07-16 |
| 8338075 | Positive resist composition and method of forming resist pattern | Shinji Kumada, Yasuhiro Yoshii, Takeshi Iwai, Tsuyoshi Nakamura | 2012-12-25 |
| 8268529 | Positive resist composition, method of forming resist pattern using the same, and polymeric compound | Takahiro Dazai, Daiju Shiono, Tomoyuki Hirano, Tasuku Matsumiya | 2012-09-18 |
| 8247159 | Positive resist composition and method of forming resist pattern | Ryoji Watanabe | 2012-08-21 |
| 8247161 | Resist composition for immersion exposure, method of forming resist pattern, and fluorine-containing resin | Yasuhiro Yoshii | 2012-08-21 |
| 8216764 | Positive resist composition and method of forming resist pattern | — | 2012-07-10 |
| 8097396 | Positive resist composition and method for forming resist pattern | Hiroaki Shimizu | 2012-01-17 |
| 8092979 | Resist polymer and resist composition | Hikaru Momose, Atsushi Ootake, Akifumi Ueda, Tadayuki Fujiwara, Ryotaro Hayashi +1 more | 2012-01-10 |
| 7972762 | Positive resist composition and method of forming resist pattern | Masaaki Muroi, Kota Atsuchi, Takahiro Nakamura, Masakazu Yamada, Kensuke Saisyo +2 more | 2011-07-05 |
| 7968276 | Positive resist composition and method of forming resist pattern | — | 2011-06-28 |
| 7964331 | Positive resist composition and method of forming resist pattern | — | 2011-06-21 |
| 7939243 | Resin, resist composition and method of forming resist pattern | Jun Iwashita, Takeshi Iwai, Yuji Ohgomori | 2011-05-10 |
| 7855044 | Positive resist composition and method of forming resist pattern | Hideo Hada, Takeshi Iwai | 2010-12-21 |
| 7829259 | Resin for photoresist composition, photoresist composition and method for forming resist pattern | Hideo Hada, Shogo Matsumaru, Hiroaki Shimizu | 2010-11-09 |
| 7776511 | Positive resist composition and method of forming resist pattern | Ryoji Watanabe | 2010-08-17 |