Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099479 | Resist composition, method of forming resist pattern, polymeric compound, and copolymer | Takashi Nagamine, Masafumi FUJISAKI, Tatsuya Fujii, Yuki FUKUMURA, Takahiro Kojima +3 more | 2021-08-24 |
| 10180625 | Resist composition, method of forming resist pattern, compound, and acid diffusion control agent | Takashi Nagamine, Kotaro Endo | 2019-01-15 |
| 9851637 | Resist composition, method of forming resist pattern, compound, and acid diffusion control agent | Takashi Nagamine, Kotaro Endo | 2017-12-26 |
| 9678423 | Resist composition, method for forming resist pattern, acid generator and compound | Takashi Nagamine, Daichi Takaki | 2017-06-13 |
| 9494866 | Resist composition and method of forming resist pattern | Tsuyoshi Nakamura, Jiro Yokoya, Hiroaki Shimizu | 2016-11-15 |
| 9411224 | Method of forming resist pattern | Jiro Yokoya, Tsuyoshi Nakamura, Hiroaki Shimizu, Masaru Takeshita, Hirokuni Saito | 2016-08-09 |
| 9405200 | Resist composition and method of forming resist pattern | Tsuyoshi Nakamura, Jiro Yokoya, Hiroaki Shimizu | 2016-08-02 |
| 9377685 | Resist composition and method of forming resist pattern | Hiroaki Shimizu, Tsuyoshi Nakamura, Jiro Yokoya | 2016-06-28 |
| 9097969 | Compound, resist composition and method of forming resist pattern | Yoshiyuki Utsumi | 2015-08-04 |
| 9029070 | Resist composition and method of forming resist pattern | Hiroaki Shimizu, Tsuyoshi Nakamura, Jiro Yokoya | 2015-05-12 |
| 9023585 | Resist composition and method of forming resist pattern | Tsuyoshi Nakamura, Jiro Yokoya, Hiroaki Shimizu | 2015-05-05 |
| 9005872 | Resist composition and method of forming resist pattern | Hiroaki Shimizu, Sho Abe | 2015-04-14 |
| 8968990 | Method of forming resist pattern | Jiro Yokoya, Tsuyoshi Nakamura, Hiroaki Shimizu | 2015-03-03 |
| 8956800 | Resist composition and method of forming resist pattern | Hiroaki Shimizu, Jiro Yokoya, Tsuyoshi Nakamura | 2015-02-17 |
| 8790868 | Method of forming resist pattern and negative tone-development resist composition | Hiroaki Shimizu | 2014-07-29 |
| 8475997 | Resist composition for immersion exposure, method of forming resist pattern, and fluorine-containing polymeric compound | Daiju Shiono, Tomoyuki Hirano, Sanae Furuya, Takahiro Dazai, Hiroaki Shimizu +2 more | 2013-07-02 |
| 8323869 | Positive resist composition and method of forming resist pattern | Hiroaki Shimizu, Junichi Tsuchiya, Takahiro Dazai | 2012-12-04 |
| 8221956 | Resist composition for immersion exposure, method of forming resist pattern, and flourine-containing polymeric compound | Daiju Shiono, Tomoyuki Hirano, Sanae Furuya, Takahiro Dazai, Hiroaki Shimizu +2 more | 2012-07-17 |