Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11703757 | Resist composition and method of forming resist pattern | Hirokuni Saito, Makoto Sakata | 2023-07-18 |
| 10514600 | Resist composition, method of forming resist pattern, compound, and acid diffusion control agent | Takashi Nagamine, Kyo Hatakeyama | 2019-12-24 |
| 10429740 | Method of recovering resist pattern | Junichi Tsuchiya, Rikita Tsunoda, Miki Shinomiya, Masafumi FUJISAKI | 2019-10-01 |
| 9678423 | Resist composition, method for forming resist pattern, acid generator and compound | Takashi Nagamine, Hideto Nito | 2017-06-13 |
| 9671690 | Resist composition, method for forming resist pattern, photo-reactive quencher and compound | Takashi Nagamine, Miki Shinomiya | 2017-06-06 |
| 9639002 | Method of forming resist pattern | Masatoshi Arai, Yoshitaka Komuro | 2017-05-02 |
| 9250531 | Method of forming resist pattern and negative tone-development resist composition | Tomoyuki Hirano, Daiju Shiono, Kenri Konno, Isamu Takagi | 2016-02-02 |
| 9133102 | Resist composition, method of forming resist pattern and polymeric compound | Daiju Shiono, Yoshiyuki Utsumi, Takaaki Kaiho | 2015-09-15 |
| 9091915 | Resist composition, method of forming resist pattern, polymeric compound and method of producing polymeric compound | Yoshiyuki Utsumi, Masatoshi Arai | 2015-07-28 |
| 9023581 | Resist composition, method of forming resist pattern, polymeric compound, and compound | Akiya Kawaue, Kazushige Dohtani, Yoshiyuki Utsumi, Jun Iwashita, Kenri Konno +1 more | 2015-05-05 |
| 9017924 | Resist composition, method of forming resist pattern, polymeric compound and compound | Yoshiyuki Utsumi | 2015-04-28 |
| 8986919 | Resist composition, method of forming resist pattern and polymeric compound | Daiju Shiono, Masatoshi Arai, Jun Iwashita, Kenri Konno | 2015-03-24 |
| 8927191 | Resist composition, method of forming resist pattern and polymeric compound | Junichi Tsuchiya, Masatoshi Arai, Daiju Shiono, Tomoyuki Hirano | 2015-01-06 |
| 8916332 | Resist composition, method of forming resist pattern, and polymeric compound | Makiko Irie, Tomoyuki Hirano | 2014-12-23 |
| 8911928 | Resist composition, method of forming resist pattern, polymeric compound and method of producing the same | Tomoyuki Hirano, Daiju Shiono, Junichi Tsuchiya | 2014-12-16 |
| 8778595 | Resist composition, method of forming resist pattern, and polymeric compound | Daiju Shiono, Yoshiyuki Utsumi, Jun Iwashita | 2014-07-15 |
| 8735045 | Positive resist composition, method of forming resist pattern, and polymeric compound | Tomoyuki Hirano, Daiju Shiono | 2014-05-27 |
| 8685620 | Resist composition, method of forming resist pattern and polymeric compound | Daiju Shiono, Yoshiyuki Utsumi, Takaaki Kaiho | 2014-04-01 |
| 8658343 | Resist composition, and method of forming resist pattern | Masatoshi Arai, Junichi Tsuchiya, Daiju Shiono, Tomoyuki Hirano | 2014-02-25 |
| 8609320 | Resist composition, method of forming resist pattern, polymeric compound and compound | Yoshiyuki Utsumi, Takehiro Seshimo, Tomoyuki Hirano, Junichi Tsuchiya | 2013-12-17 |
| 8450044 | Positive resist composition and method of forming resist pattern | Tomoyuki Hirano, Daiju Shiono | 2013-05-28 |
| 8298748 | Positive resist composition, method of forming resist pattern, and polymeric compound | Takehiro Seshimo, Yoshiyuki Utsumi, Yoshitaka Komuro, Takeyoshi Mimura | 2012-10-30 |
| 8227170 | Resist composition, method of forming resist pattern, polymeric compound, and compound | Takahiro Dazai, Daiju Shiono, Tomoyuki Hirano, Tasuku Matsumiya, Takayoshi Mori +1 more | 2012-07-24 |