Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9746766 | Composition for nanoimprint and nanoimprint pattern forming method | — | 2017-08-29 |
| 9250531 | Method of forming resist pattern and negative tone-development resist composition | Tomoyuki Hirano, Daichi Takaki, Daiju Shiono, Isamu Takagi | 2016-02-02 |
| 9097971 | Compound, radical polymerization initiator, method for producing compound, polymer, resist composition, and method for forming resist pattern | Yoshiyuki Utsumi, Takahiro Dazai, Jun Iwashita | 2015-08-04 |
| 9057948 | Resist composition for EUV or EB, and method of forming resist pattern | Jun Iwashita, Daisuke Kawana, Tatsuya Fujii, Kenta Suzuki | 2015-06-16 |
| 9023581 | Resist composition, method of forming resist pattern, polymeric compound, and compound | Akiya Kawaue, Kazushige Dohtani, Yoshiyuki Utsumi, Jun Iwashita, Daiju Shiono +1 more | 2015-05-05 |
| 8986919 | Resist composition, method of forming resist pattern and polymeric compound | Daichi Takaki, Daiju Shiono, Masatoshi Arai, Jun Iwashita | 2015-03-24 |
| 8795948 | Resist composition, method of forming resist pattern and polymeric compound | Takahiro Dazai, Yoshiyuki Utsume, Jun Iwashita, Kensuke Matsuzawa | 2014-08-05 |
| 8586281 | Positive resist composition and method of forming resist pattern | Jun Iwashita, Masahito Yahagi, Isamu Takagi | 2013-11-19 |