Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8574809 | Positive resist composition and method of forming resist pattern | Jun Iwashita | 2013-11-05 |
| 8298748 | Positive resist composition, method of forming resist pattern, and polymeric compound | Takehiro Seshimo, Yoshiyuki Utsumi, Yoshitaka Komuro, Daichi Takaki | 2012-10-30 |
| 8278022 | Positive resist composition and method of forming resist pattern | Makiko Irie | 2012-10-02 |
| 8232040 | Positive resist composition and method of forming resist pattern | Jun Iwashita | 2012-07-31 |
| 7914968 | Positive resist composition and method of forming resist pattern | Akiya Kawaue, Ryoichi Takasu | 2011-03-29 |
| 7150956 | Chemical amplification type positive resist composition, resist laminated material, resist pattern forming method and method of manufacturing semiconductor device | Kazuyuki Nitta, Satoshi Shimatani, Waki Okubo, Tatsuya Matsumi | 2006-12-19 |
| 6921621 | Positive resist composition of chemical amplification type, resist coated material, method of forming resist pattern, and process for producing semiconductor device | Kazuyuki Nitta, Satoshi Shimatani, Waki Okubo, Tatsuya Matsumi | 2005-07-26 |