Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7150956 | Chemical amplification type positive resist composition, resist laminated material, resist pattern forming method and method of manufacturing semiconductor device | Kazuyuki Nitta, Takeyoshi Mimura, Satoshi Shimatani, Tatsuya Matsumi | 2006-12-19 |
| 6921621 | Positive resist composition of chemical amplification type, resist coated material, method of forming resist pattern, and process for producing semiconductor device | Kazuyuki Nitta, Takeyoshi Mimura, Satoshi Shimatani, Tatsuya Matsumi | 2005-07-26 |
| 6638684 | Photosensitive laminate, process for forming resist pattern using same and positive resist composition | Kazufumi Sato, Kazuyuki Nitta, Toshiyuki Ogata | 2003-10-28 |