Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11780946 | Alternating copolymer, method of producing alternating copolymer, method of producing polymeric compound, and method of forming resist pattern | Akiyoshi Yamazaki, Daisuke Kawana, Masatoshi Arai, Nobuhiro MICHIBAYASHI, Takatoshi Inari | 2023-10-10 |
| 11747724 | Organically modified metal oxide nanoparticles, organically modified metal oxide nanoparticles-containing solution, organically modified metal oxide nanoparticles-containing resist composition, and resist pattern forming method | Kiwamu Sue, Sho KATAOKA, Yusuke YOSHIGOE, Takatoshi Inari, Masatoshi Arai +2 more | 2023-09-05 |
| 11709425 | Resist composition and method of forming resist pattern | Takaya Maehashi | 2023-07-25 |
| 11703756 | Resist composition and method of forming resist pattern | Koshi Onishi, KhanhTin Nguyen, Masatoshi Arai | 2023-07-18 |
| 11667605 | Resist composition, method of forming resist pattern, compound, acid generator, and method of producing compound | Hiroto Yamazaki, Masatoshi Arai | 2023-06-06 |
| 11560444 | Method of producing block copolymer capable of creating specific structure pattern | Teruaki Hayakawa, Seina Yamazaki, Akiyoshi Yamazaki, Daisuke Kawana, Takaya Maehashi +1 more | 2023-01-24 |
| 11281099 | Resist composition, method of forming resist pattern, compound, acid generator, and method of producing compound | Hiroto Yamazaki, Masatoshi Arai | 2022-03-22 |
| 11256169 | Resist composition, and method of forming resist pattern | Takuya Ikeda, Nobuhiro MICHIBAYASHI, Mari MURATA, Hiroto Yamazaki, Masatoshi Arai | 2022-02-22 |
| 11221557 | Resist composition, method of forming resist pattern, compound, and acid generator | Takuya Ikeda, Masahiro SHIOSAKI, Masatoshi Arai | 2022-01-11 |
| 10414918 | Method of preparing polymer compound | Masatoshi Arai, Koshi Onishi, KhanhTin Nguyen, Masahiro SHIOSAKI, Takuya Ikeda +1 more | 2019-09-17 |
| 10394122 | Resist composition, method for forming resist pattern, compound, and acid generator | Issei Suzuki, Masahito Yahagi, Yuki FUKUMURA, Kazuaki Ebisawa, Toshikazu Takayama +2 more | 2019-08-27 |
| 10366888 | Pattern forming method | Kazuki Yamada, Masatoshi Yamato, Hidetami Yaegashi, Takehiro Seshimo, Katsumi Ohmori | 2019-07-30 |
| 10324377 | Resist composition and method of forming resist pattern | Taku Hirayama, Daisuke Kawana, Masatoshi Arai, Shogo Matsumaru, Kenta Suzuki +2 more | 2019-06-18 |
| 10317797 | Pattern forming method for forming a pattern | Hidetami Yaegashi, Kenichi Oyama, Katsumi Ohmori, Takehiro Seshimo | 2019-06-11 |
| 10295905 | Resist composition, method for forming resist pattern, and polymer compound | Masatoshi Arai, Koshi Onishi, KhanhTin Nguyen, Takaya Maehashi | 2019-05-21 |
| 10100134 | Method for manufacturing polymer compound | Masatoshi Arai, Akiya Kawaue | 2018-10-16 |
| 9862695 | Monomer having N-acyl carbamoyl group and lactone skeleton, and polymeric compound | Hiroshi Koyama, Masamichi Nishimura, Naoki Yamashita, Tomoyuki Hirano, Yoshiyuki Utsumi | 2018-01-09 |
| 9766541 | Positive-type resist composition, method for forming resist pattern, photo-reactive quencher, and polymeric compound | Hiroto Yamazaki, Masatoshi Arai, Daisuke Kawana, Kenta Suzuki, Tatsuya Fujii | 2017-09-19 |
| 9639002 | Method of forming resist pattern | Masatoshi Arai, Daichi Takaki | 2017-05-02 |
| 9606433 | Resist composition, method of forming resist pattern, polymeric compound and compound | Yoshiyuki Utsumi, Masatoshi Arai, Takahiro Dazai | 2017-03-28 |
| 9557647 | Resist composition and method of forming resist pattern | Takaya Maehashi, Takashi Nagamine | 2017-01-31 |
| 9499646 | Negative resist composition, method of forming resist pattern and complex | Naoki Yamashita, Yoshiyuki Utsumi, Daiju Shiono | 2016-11-22 |
| 9411227 | Resist composition, method of forming resist pattern, compound, and polymeric compound | Takashi Nagamine, Junichi Tsuchiya, Masatoshi Arai | 2016-08-09 |
| 9366960 | Negative resist composition, method of forming resist pattern, and complex | Naoki Yamashita, Yoshiyuki Utsumi, Daiju Shiono | 2016-06-14 |
| 9354515 | Resist composition, acid generator, polymeric compound and method of forming resist pattern | Takashi Nagamine, Masatoshi Arai, Yoshiyuki Utsumi | 2016-05-31 |