Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9341947 | Resist composition and method of forming resist pattern | Naoki Yamashita, Tomoyuki Hirano | 2016-05-17 |
| 9244347 | Resist composition, compound, polymeric compound and method of forming resist pattern | Takaaki Kaiho, Toshiaki Hato, Akiya Kawaue, Junichi Tsuchiya, Yoshiyuki Utsumi | 2016-01-26 |
| 9235123 | Resist composition and resist pattern forming method | Tsuyoshi Nakamura, Kazuishi Tanno, Naoto Motoike, Tomoyuki Hirano, Masatoshi Arai | 2016-01-12 |
| 9164379 | Resist composition, method for forming resist pattern, and compound | Yoshiyuki Utsumi, Tomoyuki Hirano | 2015-10-20 |
| 9164380 | Resist composition and method of forming resist pattern | Yoshiyuki Utsumi, Akiya Kawaue, Toshiaki Hato | 2015-10-20 |
| 9164381 | Resist composition, method of forming resist pattern, and compound | Shinji Kumada | 2015-10-20 |
| 9104101 | Resist composition, method of forming resist pattern and polymeric compound | Kensuke Matsuzawa, Jun Iwashita, Masatoshi Arai | 2015-08-11 |
| 9063416 | Resist composition, method of forming resist pattern and compound | Yoshiyuki Utsumi, Akiya Kawaue, Toshiaki Hato | 2015-06-23 |
| 9045398 | Sulfonium salt and photo-acid generator | Issei Suzuki, Takuya Ikeda, Yusaku Takashima, Takeshi Furuta, Yoshiyuki Utsumi +2 more | 2015-06-02 |
| 9017919 | Resist composition, method of forming resist pattern, novel compound and acid generator | Yoshiyuki Utsumi, Akiya Kawaue, Kenichiro Miyashita | 2015-04-28 |
| 9005874 | Compound, polymeric compound, acid generator, resist composition, and method of forming resist pattern | Yoshiyuki Utsumi, Akiya Kawaue, Masatoshi Arai | 2015-04-14 |
| 8785106 | Resist composition and method of forming resist pattern | Toshiaki Hato | 2014-07-22 |
| 8614049 | Resist composition and method of forming resist pattern | Yoshiyuki Utsumi, Masaru Takeshita, Hiroaki Shimizu, Syo Abe | 2013-12-24 |
| 8497395 | Compound | Yoshiyuki Utsumi, Masaru Takeshita | 2013-07-30 |
| 8298748 | Positive resist composition, method of forming resist pattern, and polymeric compound | Takehiro Seshimo, Yoshiyuki Utsumi, Takeyoshi Mimura, Daichi Takaki | 2012-10-30 |
| 7955777 | Compound, acid generator, resist composition and method of forming resist pattern | Takehiro Seshimo, Yoshiyuki Utsumi, Keita Ishiduka, Akiya Kawaue, Kyoko Ohshita | 2011-06-07 |
| 7858287 | Photosensitive resin, and photosensitive composition | Takeo Watanabe, Hiroo Kinoshita, Shinichi Yusa, Tomotaka Yamanaka, Masamichi Hayakawa +2 more | 2010-12-28 |