Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834696 | Undercoat agent and method of forming pattern of layer containing block copolymer | Takahiro Senzaki, Ken Miyagi, Tsuyoshi Kurosawa, Daiju Shiono, Tasuku Matsumiya +1 more | 2017-12-05 |
| 9676934 | Block copolymer-containing composition and method of reducing pattern | Takahiro Senzaki, Ken Miyagi | 2017-06-13 |
| 9475088 | Method of producing structure containing phase-separated structure, phase separated structure, and block copolymer composition | Tsuyoshi Kurosawa, Daiju Shiono, Ken Miyagi, Tasuku Matsumiya, Katsumi Ohmori | 2016-10-25 |
| 9169421 | Method of producing structure containing phase-separated structure, method of forming pattern, and top coat material | Tasuku Matsumiya, Takehiro Seshimo, Katsumi Ohmori, Ken Miyagi, Daiju Shiono +2 more | 2015-10-27 |
| 9029073 | Undercoat agent, and pattern formation method for layer containing block copolymer | Takahiro Senzaki, Ken Miyagi | 2015-05-12 |
| 9017919 | Resist composition, method of forming resist pattern, novel compound and acid generator | Yoshiyuki Utsumi, Akiya Kawaue, Yoshitaka Komuro | 2015-04-28 |
| 8846291 | Resist composition, method of forming resist pattern, and new compound | Yoshiyuki Utsumi, Akiya Kawaue | 2014-09-30 |