Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411408 | Resist composition and method of forming resist pattern | Masahito Yahagi, Yosuke Suzuki, Yuta Iwasawa, Takahiro Kojima, Koshi Onishi | 2025-09-09 |
| 11835857 | Resist composition and method of forming resist pattern | Yuta Iwasawa, Yosuke Suzuki | 2023-12-05 |
| 10179866 | Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure | Akiya Kawaue, Takehiro Seshimo, Takaya Maehashi, Ken Miyagi, Hitoshi Yamano +2 more | 2019-01-15 |
| 10101660 | Methods of forming patterns of semiconductor devices | Jeong-Ju Park, Seung-chul Kwon, Eun-Sung Kim, Kyeong-Mi Lee, Shi-Yong Yi +2 more | 2018-10-16 |
| 10100221 | Method of producing structure containing phase-separated structure, block copolymer composition, and organic solvent used for block copolymer composition | Hitoshi Yamano, Tsuyoshi Kurosawa, Taku Hirayama, Ken Miyagi, Katsumi Ohmori | 2018-10-16 |
| 10066096 | Method of producing structure containing phase-separated structure and resin composition for forming phase-separated structure | Tsuyoshi Kurosawa, Masahito Yahagi, Hitoshi Yamano, Ken Miyagi, Daiju Shiono +2 more | 2018-09-04 |
| 9914847 | Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure | Akiya Kawaue, Takehiro Seshimo, Takaya Maehashi, Ken Miyagi, Hitoshi Yamano +2 more | 2018-03-13 |
| 9834696 | Undercoat agent and method of forming pattern of layer containing block copolymer | Takahiro Senzaki, Ken Miyagi, Tsuyoshi Kurosawa, Daiju Shiono, Kenichiro Miyashita +1 more | 2017-12-05 |
| 9828519 | Resin composition for forming a phase-separated structure, and method of producing structure containing phase-separated structure | Akiya Kawaue, Takehiro Seshimo, Takaya Maehashi, Ken Miyagi, Hitoshi Yamano +2 more | 2017-11-28 |
| 9821338 | Method of producing structure containing phase-separated structure utilizing a brush composition comprising PS-PMMA | Hitoshi Yamano, Masahito Yahagi, Tsuyoshi Kurosawa, Ken Miyagi | 2017-11-21 |
| 9816003 | Method of producing structure containing phase-separated structure | Tsuyoshi Kurosawa, Daiju Shiono, Ken Miyagi, Hitoshi Yamano, Taku Hirayama +1 more | 2017-11-14 |
| 9776208 | Brush composition, and method of producing structure containing phase-separated structure | Masahito Yahagi, Takaya Maehashi, Akiya Kawaue, Issei Suzuki, Tsuyoshi Kurosawa +1 more | 2017-10-03 |
| 9567477 | Undercoat agent and method of producing structure containing phase-separated structure | Takehiro Seshimo, Takaya Maehashi, Takahiro Dazai, Yoshiyuki Utsumi | 2017-02-14 |
| 9475088 | Method of producing structure containing phase-separated structure, phase separated structure, and block copolymer composition | Tsuyoshi Kurosawa, Daiju Shiono, Ken Miyagi, Kenichiro Miyashita, Katsumi Ohmori | 2016-10-25 |
| 9442371 | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern | Takehiro Seshimo, Takaya Maehashi, Takahiro Dazai, Yoshiyuki Utsumi, Ken Miyagi +2 more | 2016-09-13 |
| 9206307 | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern | Takehiro Seshimo, Ken Miyagi, Takaya Maehashi, Takahiro Dazai, Yoshiyuki Utsumi | 2015-12-08 |
| 9169421 | Method of producing structure containing phase-separated structure, method of forming pattern, and top coat material | Takehiro Seshimo, Katsumi Ohmori, Ken Miyagi, Daiju Shiono, Kenichiro Miyashita +2 more | 2015-10-27 |
| 8846838 | Fluorine-containing block copolymeric compound | Daiju Shiono, Tomoyuki Hirano, Takahiro Dazai | 2014-09-30 |
| 8541529 | Positive resist composition, method of forming resist pattern, and polymeric compound | Takahiro Dazai, Tomoyuki Hirano, Daiju Shiono | 2013-09-24 |
| 8487056 | Positive resist composition and method of forming resist pattern | Daiju Shiono, Tomoyuki Hirano, Takahiro Dazai, Kotaro Endo | 2013-07-16 |
| 8404428 | Positive resist composition, method of forming resist pattern using the same, and fluorine-containing polymeric compound | Daiju Shiono, Tomoyuki Hirano, Takahiro Dazai | 2013-03-26 |
| 8367296 | Positive resist composition, method of forming resist pattern, and polymeric compound | Tomoyuki Hirano, Takahiro Dazai, Daiju Shiono | 2013-02-05 |
| 8329378 | Positive resist composition, method of forming resist pattern, and polymeric compound | Tomoyuki Hirano, Daiju Shiono, Takahiro Dazai | 2012-12-11 |
| 8268529 | Positive resist composition, method of forming resist pattern using the same, and polymeric compound | Takahiro Dazai, Daiju Shiono, Tomoyuki Hirano, Masaru Takeshita | 2012-09-18 |
| 8236477 | Positive resist composition and method of forming resist pattern | Daiju Shiono, Tomoyuki Hirano, Takahiro Dazai, Kotaro Endo | 2012-08-07 |