Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10352964 | Cantilever set for atomic force microscopes, substrate surface inspection apparatus including the same, method of analyzing surface of semiconductor substrate by using the same, and method of forming micropattern by using the same | Kyeong-Mi Lee, Jeong-Ju Park, Shi-Yong Yi, Eun-Sung Kim, Sang Ouk Kim +1 more | 2019-07-16 |
| 10101660 | Methods of forming patterns of semiconductor devices | Jeong-Ju Park, Eun-Sung Kim, Kyeong-Mi Lee, Shi-Yong Yi, Tsuyosh Kurosawa +2 more | 2018-10-16 |
| 9892918 | Method of forming pattern of semiconductor device | Eun-Sung Kim, Kyeong-Mi Lee, Jeong-Ju Park, Shi-Yong Yi | 2018-02-13 |
| 9704722 | Method of forming fine pattern and method of manufacturing integrated circuit device using the method | Jeong-Ju Park, Eun-Sung Kim, Jae-woo Nam, Shi-Yong Yi, Hyun-Woo Kim | 2017-07-11 |
| 9653294 | Methods of forming fine patterns and methods of manufacturing integrated circuit devices using the methods | Eun-Sung Kim, Dae Yong Kang, Shi-Yong Yi | 2017-05-16 |