Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10352964 | Cantilever set for atomic force microscopes, substrate surface inspection apparatus including the same, method of analyzing surface of semiconductor substrate by using the same, and method of forming micropattern by using the same | Jeong-Ju Park, Shi-Yong Yi, Eun-Sung Kim, Seung-chul Kwon, Sang Ouk Kim +1 more | 2019-07-16 |
| 10101660 | Methods of forming patterns of semiconductor devices | Jeong-Ju Park, Seung-chul Kwon, Eun-Sung Kim, Shi-Yong Yi, Tsuyosh Kurosawa +2 more | 2018-10-16 |
| 9892918 | Method of forming pattern of semiconductor device | Eun-Sung Kim, Seung-chul Kwon, Jeong-Ju Park, Shi-Yong Yi | 2018-02-13 |